Dual PECVD&RIE System

 

Wafer/Mask Cleaning

 

Sputtering with Auto Load-lock and Elevator

 

PECVD System for CNT

 

Heated Platens

 

 

Nano-Master, Inc. serves a broad range of industries and markets including Semiconductor, MEMS, Opto-electronics, Nano Technology, Manufacturing and R&D Markets. It provides state of art solutions in plasma processing, sputtering, thermal and e-beam evaporation, ion beam etching, megasonic wafer/mask cleaning, single wafer chemical processing and ultra-pure chemical handling technologies.

Nano-Master, Inc. manufactures a complete line of sputtering systems with reactive sputtering, co-sputtering and combinatorial sputtering, PECVD tools, RIE and Deep RIE systems along with thermal and e-beam evaporators, and single wafer megasonic cleaners.

Over the past years, Nano-Master has developed strategic partnership with leading technology companies throughout the world to distribute and market their products in the United States. Nano-Master now has the exclusive responsibility to distribute SURPASS Industry line of products in the USA. Surpass is known worldwide for their quality products, their leadership in technology, and their success in the markets that they participate.

Surpass Industry Co. Ltd. ultra-pure clean products consist of Pressure regulators, Flow controllers, Pressure sensors and switches, Check valves, Gauges, Relief valves, Quick connectors, Flow meters.

Many years of experience in all aspects of semiconductor manufacturing and ample expertise in vacuum technology, chemical processing, plasma processing, cleaning and material science, brings Nano-Master, Inc. in a unique position to participate in the nano technology revolution by providing unique tools with unique capabilities.

Flowmeters

 

Pressure Regulators

 

Pulsed DC

 

Optical Sensors

 

Capacitive Sensors