Wafer/Mask Cleaners

Sputtering Systems

Etching Systems

PECVD Systems

Thermal Evaporators

Heated Platens

Ultra-Pure Processing

Plasma Processing

Pulsed DC Controllers

Optical Sensors

Capacitve Sensors

CLEARANCE

IWATA OIL-FREE SCROLL VACUUM PUMPS

About Oil-Free Scroll Pumps:

  • Provide clean operating requirement

  • No sealant or lubricant required

  • Ambient air-cooled

  • Uses two scrolls that fit inside each other- one scroll is stationary while one revolves around the stationary scroll

  • This creates crescent shaped gas pockets which are sealed and compressed by scroll movement- then expelled through the center of the fixed scroll

 

Pump models:

 

ISP Series-"The Original"

Iwata ISP-250B Oil-Free Scroll Vacuum Pumps are private-labeled for:

Iwata ISP-500B Oil-Free Scroll Vacuum Pump is private-labeled for:

DVSL Series (High Vapor Pumping Capacity Scroll Pumps)

DVSL-100B

DVSL500B