Wafer/Mask Cleaners

Sputtering Systems

Etching Systems

PECVD Systems

Thermal Evaporators

Heated Platens

Ultra-Pure Processing

Plasma Processing

Pulsed DC Controllers

Optical Sensors

Capacitve Sensors

CLEARANCE

IWATA DVSL-100B Oil-Free Scroll Vacuum Pump

DVSL-500B

Over 6 years of proven field experience
No bearings
No crankshafts or crankshaft seals
No hydrocarbons in the gas path
 
Specifications:  
Displacement @ 50 Hz operation 430 liters/min (15.2 cfm)
Displacement @ 60 Hz operation 520 liters/min (18.4 cfm)
Operating temperature range 5-40 °C
Ultimate Pressure 10 Pa (75x10-3 Torr)
Motor Power Rating 1.1 kW/ 1.47 HP
Voltage (single-phase, 50 Hz) 100/200/230 V
Voltage (single-phase, 60 Hz) 100/115/200/230 V
Noise level 65 db (A) at 1m
Noise level with Air Flush
68 db (A)
Water Handling Allowance
100+ g/day
Air Flush Flow Rate
1.02 l/min
Inlet Connection NW 40
Outlet Connection NW 25
Cooling System Air-cooled
Dimensions (LxWxH) 473 x 270 x 441 mm
18.6"x10.6"x17.4"
Weight 53 kg / 116 lbs
Pump Curve:  
Pumping Speed Curve