|
L2P Langmuir Probe System
|
|
For plasma
characterization and process control |
|
IEE Science
Education and Technology Award, 1999 |
|
|
|
Applications for Single Probe Operation: |
|
Electron and ion density
|
|
Electron temperature
|
|
Electron energy distribution function EEDF |
|
Plasma and floating potential |
| |
|
Applications for Double Probe Operation: |
|
Ion density
|
|
Electron temperature
|
|
Floating potential
|
