Wafer/Mask Cleaners

Sputtering Systems

Etching Systems

PECVD Systems

Thermal Evaporators

Heated Platens

Ultra-Pure Processing

Plasma Processing

Pulsed DC Controllers

Optical Sensors

Capacitve Sensors

CLEARANCE

NANO-MASTER SHOWER HEAD PLASMA SOURCE SH-1000

Features:

 

RF Shower Head Source

Gases through RF Plate

Secondary Plate to introduce other gasses to plasma

Water Cooled

Up to 600 W

0.02 Torr to 8 Torr operation

Water Cooled

8" active area

ISO 250 Flange

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