Wafer/Mask Cleaners

Sputtering Systems

Etching Systems

PECVD Systems

Thermal Evaporators

Heated Platens

Ultra-Pure Processing

Plasma Processing

Pulsed DC Controllers

Optical Sensors

Capacitve Sensors

CLEARANCE

SURPASS PRESSURE REGULATORS

 

 

Standard Pressure Regulators

 

Pneumatically-operated GCRM Series

Manually-operated FCRM Series

 

GCRM-1/2

FCRM-1/4

 

 

High Temperature Types

 

Pneumatically-operated GCRM-HT Series

Manually-operated FCRM-HT Series

GCRM-3/8-HT

FCRM-3/8-HT

   

Compact Manual Pressure Regulators

 

MCR Series

Integrated Models

 

MCR-2

Integrated with pressure sensor or pressure gauge, for the downstream pressure third port on the regulator also available
New Pressure Regulators
 
Pneumatic Pressure Regulators with integrated liquid bleeding line (GCRM-HR Series)

 

 
 
GCRM-3/4-HR Normal Operation Valve is closed, bleeding line is open, leak rate can be adjusted from the knob

Features:

 
To prevent the stagnation for critical fluids  
No extra by-pass or bleeding line necessary  

Saves excessive fluid consumption

 
 

Pneumatic Back pressure control type Pressure Regulators (GCVRM Series)

GCVRM-3/4-8

   

Features:

 
Opening or closing the valves in the downstream or head pressure change effects the downstream pressure
GCVRM maintains the constant flow and the pressure in the downstream, regardless of any pressure change
Mechanical feedback line in the downstream allows to compensate the pressure change with a secondary diaphragm
 

Flow Controlling Valves with internal adjustable orifice

CVR Series

Fine Variable Dispensing Application
Model Control Flow rate Connection Inlet Pressure Outlet Pressure Remarks
FCRM-1/4 Manual 10-1000 ml/min 1/4" OD Tube End 14-57 psig 0-14 psig max  
FCRM-3/8 Manual 1-5 l/min 3/8" OD Tube End 14-57 psig 0-14 psig max  
FCRM-1/2 Manual 4-15 l/min 1/2" OD Tube End 14-57 psig 0-14 psig max  
FCRM-3/4 Manual 10-30 l/min 3/4" OD Tube End 14-57 psig 0-14 psig max  
FCRM-3/8-HT Manual 1-5 l/min 3/8" OD Tube End 14-50 psig 0-14 psig max High Temp
FCRM-1/2-SHT Manual 4-15 l/min 1/2" OD Tube End 14-57 psig 0-14 psig max SS
GCRM-1/4 Pneumatic 10-1000 ml/min 1/4" OD Tube End 14-50 psig 0-14 psig max  
GCRM-3/8 Pneumatic 0.4-5 l/min 3/8" OD Tube End 14-50 psig 0-14 psig max  
GCRM-1/2 Pneumatic 1-15 l/min 1/2" OD Tube End 14-50 psig 0-14 psig max  
GCRM-3/4 Pneumatic 4-30 l/min 3/4" OD Tube End 14-50 psig 0-14 psig max  
GCRM-3/8-HP Pneumatic 0.4-5 l/min 3/8" OD Tube End 14-72 psig 0-29 psig max High Pressure
GCRM-1/2-HP Pneumatic 1-15 l/min 1/2" OD Tube End 14-72 psig 0-29 psig max High Pressure
GCRM-3/4-HP Pneumatic 4-30 l/min 3/4" OD Tube End 14-72 psig 0-29 psig max High Pressure
GCRM-3/8-HT Pneumatic 0.4-5 l/min 3/8" OD Tube End 14-50 psig 0-14 psig max High Temp
GCRM-3/4-HR Pneumatic 4-35 l/min 3/4" OD Tube End 14-50 psig 0-14 psig max Bleeding in
GCRM-1/2-SHTP Pneumatic 1-15 l/min 1/2" OD Tube End 14-72 psig 0-43 psig SS
GCVRM-3/4-8 Pneumatic 15-35 l/min 3/4" Pillar S 300 14-57 psig 0-43 psig Back pressure
MCR2-2A Manual 10-1000 ml/min 1/4" flared 14-57 psig 7-29 psig  
MCR2-2U Manual 10-1000 ml/min 1/4" OD Tube End 14-57 psig 7-29 psig  
MCR3-3A Manual 1-5 l/min 3/8" flared 14-57 psig 7-43 psig  
MCR3-3U Manual 1-5 l/min 3/8" OD Tube End 14-57 psig 7-43 psig  
MCR4-4U Manual 4-20 l/min 1/2" OD Tube End 14-57 psig 7-43 psig  
MCR3-HPS-3A-3U Manual 1-5 l/min 3/8" OD Tube End 14-57 psig 7-43 psig Integrated PS
CVR-1/4-2 Manual 8-15 ml/min PT 1/4 14-57 psig 0-14 psig max Flow control
CVR-1/4-3 Manual 10-31.2 ml/min PT 1/4 14-57 psig 0-14 psig max Flow control
CVR-1/4-4 Manual 30-63 ml/min PT 1/4 14-57 psig 0-14 psig max Flow control
CVR-1/4-6 Manual 60-125 ml/min PT 1/4 14-57 psig 0-14 psig max Flow control
CVR-1/4-8 Manual 120-225 ml/min PT 1/4 14-57 psig 0-14 psig max Flow control
CVR-3/8-10 Manual 200-440 ml/min PT 3/8 14-57 psig 0-14 psig max Flow control
CVR-3/8-15 Manual 430-460 ml/min PT 3/8 14-57 psig 0-14 psig max Flow control
CVR-3/8-20 Manual 0.75-1.55 l/min PT 3/8 14-57 psig 0-14 psig max Flow control
CVR-3/8-25 Manual 1.5-2.8 l/min PT 3/8 14-57 psig 0-14 psig max Flow control
CVR-3/8-35 Manual 2.7-4.5 l/min PT 3/8 14-57 psig 0-14 psig max Flow control