Wafer/Mask Cleaners

Sputtering Systems

Etching Systems

PECVD Systems

Thermal Evaporators

Heated Platens

Ultra-Pure Processing

Plasma Processing

Pulsed DC Controllers

Optical Sensors

Capacitve Sensors

CLEARANCE

SURPASS PTFE PRESSURE SENSORS

 

CS and MCS

 
CS and MCS Single Port Pressure Sensors
For all liquids and gases except HF, HCl, and nitric acid
1% accuracy at the F.S.
4-20 mA analog output (voltage outputs are also available)
1/2" flared space-saver connection ( PFA nut is included)
MCS can measure from vacuum up to 14.4 psi
 
Model Pressure Range
CS-P-15U-N 0-72.5 psig
MCS-P-15U-N 0-29 psia (absolute)
 

TPL

 
TPL Single Port Pressure Sensors
Special sensor for HF, HCl, and nitric acid applications
Solid PTFE block, no O-ring, and special diaphragm design
2% accuracy at the F.S.
4-20 mA analog output (voltage outputs are also available)
1/2" flared space-saver connection ( PFA nut is included)
 
Model Pressure Range
TPL-3AU-N 0-43.5 psig
TPL-5AU-N 0-72.5 psig
 

CS-DLS

 
CS-DLS Flow-through Pressure Sensors
NO DEAD SPACE, patented design for critical applications
For all liquids and gases except HF, HCl, and nitric acid
1% accuracy at the F.S.
4-20 mA analog output (voltage outputs are also available)
1/2" flared space-saver connection ( PFA nut is included)
 
Model Pressure Range
CS-DLS-3/4U 0-72.5 psig

DV

 
DV Digital Pressure Monitor
Displays the pressure value
2 relay outputs for high and low pressure limits
Light weight and compact (22mmx 45 mm)
 

Ordering information: