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| Nano-Master THERMAL EVAPORATOR System |
Sputter coaters for combinatorial applications
Our single wafer megasonic cleaners use patented technology! |
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Models:
NTE-3000
PC controlled table top Thermal Evaporator System
NTE-4000 PC controlled stand alone
Thermal Evaporator System
Features:
70l/sec or 200 l/sec turbomolecular pump
and mechanical or dry pump (10-6 Torr)
Bell jar or Aluminum chamber
2 kVA SCR controlled
Crystal thickness monitor
Water cooled dual crucible source
Rotating platen (1-3 rpm)
Compact footprint 26"x26"
Close loop temperature control
Max. temp 2000 °C for metals, 800°C for
organics
PC control with LabVIEWTM
software
Options:
Co-evaporation
Biasable platen
Sputtering (DC or RF)
Magnetron sputering
Plasma cleaning
Al chamber
Heated platen
Auto-shutter for crystal
Description:
Nano-Master NTE-3000 is a PC controlled table top
The NTE-4000 is a PC controlled, stand alone dual source Thermal Evaporator System.
Both systems have sputtering capabilites. |
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