HIGH TEMPERATURE PLATEN

 Models

 NM-LTP - Low Temperature Platen heatable up to 300⁰C

 NM-MTP - Mid Temperature Platen heatable up to 500⁰C

 NM-HTP - High Temperature Platen heatable up to 700⁰C

 Description

Nano-Master manufactures platens which are use patented technology and hence provide superior performance and uniform heating. Nano-Master platens are RF biasable, water-cooled, and temperature controlled with models ranging from 300C to 700C. Heights are adjustable in certain platens. Substrate can be turned. No wires or leads are in the vacuum side. There is no shorting or arcs because all leads, thermocouples and water lines are kept in atmosphere. Nano-Master platens can be directly installed into your system. Please contact Nano-Master for further information regarding your specific platen needs.

LOW TEMPERATURE PLATEN                                                 High Temperature Platen with Plasma