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Models
NM-LTP - Low
Temperature Platen heatable up to 3000C
NM-MTP - Mid
Temperature Platen heatable up to 5000C
NM-HTP - High
Temperature Platen heatable up to 7000C
Description
Nano-Master manufactures
platens which are use patented technology and hence provide
superior performance and uniform heating. Nano-Master platens are RF
biasable, water-cooled, and temperature controlled with models ranging
from 300C to 700C. Heights are adjustable in certain platens.
Substrate can be turned. No wires or leads are in the vacuum
side. There is no shorting or arcs because all leads,
thermocouples and water lines are kept in atmosphere.
Nano-Master platens can be directly installed into your system. Please
contact Nano-Master for further information regarding your specific
platen needs.
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