Auto Wafer Transfer Systems

NOC-4000 Optical Coating System


Auto Wafer Transfer Systems

NANO-MASTER's NOC-4000 Optical Coating System provides state of the art atomic level cleaning and etching of optical samples in one chamber and automated sample transfer to a second chamber for optical coating without breaking vacuum. The system can also use the chambers independently, each with its own automatic sample loading and unloading.

  • RF Biasable Platen
  • Thickness Monitor
  • 5x10-7 Torr base pressure
  • High accuracy and repeatability
  • High quality films
  • Atomic level clean surfaces
  • Atomic cleaning and polishing
  • LabVIEW user interface
  • Automatic load/Unload
  • Automatic transfer between chambers
  • Recipe driven, password protected
  • Safety interlocks
  • 46"x44" footprint
  • Sputter down/up
  • Co-sputtering
  • DC, RF and pulsed power supplies
  • Ion beam assisted deposition
  • E-Beam and plasma sources
  • Optical coatings: Sputtering and IBAD
  • Reactive ion beam etching cleaning
  • Ion beam milling
  • Infrared coatings
  • Surface treatment
NOC Data

Auto Wafer Transfer Data

Download Auto Wafer Transfer Dual System Brochure
Inside the NOC-4000 Chamber
NOC-4000 Rotating Plate
NOC-4000 Inside the Transfer Mechanism
NOC-4000 Transfer Mechanism