MW-PECVD Systems

NANO-MASTER has developed a MW-PECVD (Microwave-PECVD) for depositiing single and polycrystalline diamonds. The NMP-4000 is a stand alone, PC controlled MW-PECVD system with LabVIEW software featuring three levels of assword-controlled user authorization. The system is fully automated, and safety-interlocked. Automatic PC control of recipes, flows, and pump-down/vent cycles. Options include automatic load-unload, gas bubblers, MFCs's, etc

  • 14” Stainless steel chamber
  • 2.5GHz, 6KW Microwave plasma source w/ manual tuner and coupler
  • 4" Substrate holder, heated up to 1000°C w/ platen rotation
  • MFC's
  • Heated gas lines
  • Wide range and pirani gauges
  • Dual wavelength pyrometer for measuring wafer temperature
  • 500l/s Turbomolecular pumping package
  • Mid 10-7 torr base pressure
  • PC based fully automatic recipe driven control system
  • EMO protection and safety interlocks
  • Standard one year warranty
  • Auto load and unload wafer loadlock
  • Additional precursors
  • Bubblers
  • Polycrystalline Diamond
  • Single Crystalline Diamond
  • Graphene
  • CNT's
  • Qubit Applications
  • Supercapacitor
ALD Data


Download MW-PECVD System Brochure