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Platens

Our platens use patented technology, providing superior performance and uniform heating. NANO-MASTER platens are RF biasable, water-cooled, and temperature controlled with models ranging from 300°C to 700°C. Heights are adjustable in certain platens and substrate can be turned with no wires or leads are in the vacuum side. There is no shorting or arcs because all leads, thermocouples and water lines are kept in atmosphere. NANO-MASTER platens can be directly installed into your system.

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Plasma Sources

We offer a different kinds of plasma sources to fit your application, ranging from hollow cathode plasma sources to inductively coupled plasma sources.

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