Auto Wafer Transfer Systems
Auto Wafer Transfer Systems
NANO-MASTER's NOC-4000 Optical Coating System provides state of the art atomic level cleaning and etching of optical samples in one chamber and automated sample transfer to a second chamber for optical coating without breaking vacuum. The system can also use the chambers independently, each with its own automatic sample loading and unloading.
- RF Biasable Platen
- Thickness Monitor
- 5x10-7 Torr base pressure
- High accuracy and repeatability
- High quality films
- Atomic level clean surfaces
- Atomic cleaning and polishing
- LabVIEW user interface
- Automatic load/Unload
- Automatic transfer between chambers
- Recipe driven, password protected
- Safety interlocks
- 46"x44" footprint
- Sputter down/up
- Co-sputtering
- DC, RF and pulsed power supplies
- Ion beam assisted deposition
- E-Beam and plasma sources
- Optical coatings: Sputtering and IBAD
- Reactive ion beam etching cleaning
- Ion beam milling
- Infrared coatings
- Surface treatment
Auto Wafer Transfer Data
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